Synthesis of In2O3 Nanowires and Their Gas Sensing Properties

被引：9

作者：

Wang, Sin-Hui ^{[1
]}

Chang, Shoou-Jinn ^{[1
]}

Liu, Shin ^{[1
]}

Tsai, Tsung-Ying ^{[1
]}

Hsu, Cheng-Liang ^{[2
]}

机构：

[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Tainan 701, Taiwan

[2] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

来源：

IEEE SENSORS JOURNAL | 2016年 / 16卷 / 15期

关键词：

In2O3; nanowires; gas sensor; SENSOR;

D O I：

10.1109/JSEN.2016.2577023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the synthesis of In2O3 nanowires (NWs) through the vapor-liquid-solid growth mechanism and the fabrication of an In2O3 NW ethanol gas sensor. It was found that the 1-D In2O3 NWs could only be grown at temperatures higher than 850 degrees C. It was also found that the average length increased while the average diameter decreased as the growth temperature increased. For the fabricated gas sensors, the response (R-a/R-g) was 1.84, 3.78, and 13.97 for the samples thermally treated at 900 degrees C, 950 degrees C, and 1000 degrees C, respectively, at the operating temperatures of 300 degrees C with 100 ppm ethanol. Disregard the sensitivity, the In2O3 nanowires could be measured at 25 degrees C to 300 degrees C. Furthermore, it was found that the fabricated device was much more sensitive to ethanol gas, compared with methanol and acetone gases.

引用

页码：5850 / 5855

页数：6

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