Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser

被引：82
作者：
Kanai, T
Kanda, T
Sekikawa, T
Watanabe, S
Togashi, T
Chen, CT
Zhang, CQ
Xu, ZY
Wang, JY
机构：
[1] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan
[2] RIKEN, Inst Phys & Chem Res, Sayogun, Hyogo 6795148, Japan
[3] Chinese Acad Sci, Beijing Ctr Crystal R&D, Beijing 10080, Peoples R China
[4] Chinese Acad Sci, Inst Phys, Beijing 10080, Peoples R China
[5] Shandong Univ, Natl Key Lab Crystal Mat, Jinan 250100, Shandon, Peoples R China
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 2004年 / 21卷 / 02期
关键词：
D O I：
10.1364/JOSAB.21.000370
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have generated a vacuum-ultraviolet light below 160 nm by sum-frequency mixing in an optically contacted, prism-coupled KBe2BO3F2 crystal. The vacuum-ultraviolet light was generated as the fifth harmonic of a tunable, single-mode, 1-kHz Ti:sapphire laser system. The wavelength of 156 nm, to our knowledge, is the shortest ever obtained by use of nonlinear crystals in a phase-matched process. In addition, we demonstrated a 157.6-nm light source as an inspection tool for F-2 laser lithography with an average power of 0.8 muW. (C) 2004 Optical Society of America.
引用
收藏
页码：370 / 375
页数：6
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