Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser

被引：83
作者：
Kanai, T
Kanda, T
Sekikawa, T
Watanabe, S
Togashi, T
Chen, CT
Zhang, CQ
Xu, ZY
Wang, JY
机构：
[1] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan
[2] RIKEN, Inst Phys & Chem Res, Sayogun, Hyogo 6795148, Japan
[3] Chinese Acad Sci, Beijing Ctr Crystal R&D, Beijing 10080, Peoples R China
[4] Chinese Acad Sci, Inst Phys, Beijing 10080, Peoples R China
[5] Shandong Univ, Natl Key Lab Crystal Mat, Jinan 250100, Shandon, Peoples R China
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 2004年 / 21卷 / 02期
关键词：
D O I：
10.1364/JOSAB.21.000370
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have generated a vacuum-ultraviolet light below 160 nm by sum-frequency mixing in an optically contacted, prism-coupled KBe2BO3F2 crystal. The vacuum-ultraviolet light was generated as the fifth harmonic of a tunable, single-mode, 1-kHz Ti:sapphire laser system. The wavelength of 156 nm, to our knowledge, is the shortest ever obtained by use of nonlinear crystals in a phase-matched process. In addition, we demonstrated a 157.6-nm light source as an inspection tool for F-2 laser lithography with an average power of 0.8 muW. (C) 2004 Optical Society of America.
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收藏
页码：370 / 375
页数：6
相关论文
共 12 条
[1]   HARMONIC AND SUM-FREQUENCY GENERATION OF PULSED LASER-RADIATION IN BBO, LBO, AND KDP [J].
BORSUTZKY, A ;
BRUNGER, R ;
HUANG, C ;
WALLENSTEIN, R .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1991, 52 (01) :55-62
[2]   Second-harmonic generation from a KBe2BO3F2 crystal in the deep ultraviolet [J].
Chen, CT ;
Lu, JH ;
Togashi, T ;
Suganuma, T ;
Sekikawa, T ;
Watanabe, S ;
Xu, ZY ;
Wang, JY .
OPTICS LETTERS, 2002, 27 (08) :637-639
[3]  
Chen CT, 1996, APPL PHYS LETT, V68, P2930, DOI 10.1063/1.116358
[4]   URBACH EFFECTS IN THE KINETICS OF CORE HOLES FOR EXCITATION OF CROSS-LUMINESCENCE [J].
DAVOLI, I ;
MIKHAILIN, VV ;
STIZZA, S ;
VASILEV, AN .
JOURNAL OF LUMINESCENCE, 1992, 51 (05) :275-282
[5]   Attaining 186-nm light generation in cooled β-BaB2O4 crystal [J].
Kouta, H ;
Kuwano, Y .
OPTICS LETTERS, 1999, 24 (17) :1230-1232
[6]   A REDETERMINATION OF SOME OPTICAL PROPERTIES OF CALCIUM FLUORIDE [J].
MALITSON, IH .
APPLIED OPTICS, 1963, 2 (11) :1103-1107
[7]   All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate [J].
Nabekawa, Y ;
Togashi, T ;
Sekikawa, T ;
Watanabe, S ;
Konno, S ;
Kojima, T ;
Fujikawa, S ;
Yasui, K .
APPLIED PHYSICS B-LASERS AND OPTICS, 2000, 70 (Suppl 1) :S171-S179
[8]   Frequency conversion of Ti:sapphire-based femtosecond laser systems to the 200-nm spectral region using nonlinear optical crystals [J].
Petrov, V ;
Rotermund, F ;
Noack, F ;
Ringling, J ;
Kittelmann, O ;
Komatsu, R .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (06) :1532-1542
[9]  
PETROV V, 1998, ELECTRON LETT, V34, P1
[10]  
SETOYA H, 2002, REPORT F LASER LITHO
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