New insights in photo-patterned sol-gel-derived TiO2 films

被引：39

作者：

Briche, S. ^{[1
]}

Tebby, Z. ^{[2
]}

Riassetto, D. ^{[1
]}

Messaoud, M. ^{[1
]}

Gamet, E. ^{[3
]}

Pernot, E. ^{[1
]}

Roussel, H. ^{[1
]}

Dellea, O. ^{[2
]}

Jourlin, Y. ^{[3
]}

Langlet, M. ^{[1
]}

机构：

[1] LMGP, Grenoble Inst Technol Minatec, F-38016 Grenoble, France

[2] PF D2 M CEA LITEN, F-42000 St Etienne, France

[3] Univ St Etienne, LabHC, F-42000 St Etienne, France

来源：

JOURNAL OF MATERIALS SCIENCE | 2011年 / 46卷 / 05期

关键词：

THIN POLYMER-FILMS; PHOTOCATALYTIC ACTIVITY; METAL NANOPARTICLES; PEN NANOLITHOGRAPHY; OXIDE-FILMS; MICROSTRUCTURES; TEXTILES; SURFACE; WATER; WETTABILITY;

D O I：

10.1007/s10853-010-4949-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Specific sol-gel formulations and protocols have been adapted to the fine patterning of TiO2 films using a very simplified UVA three-step lithography method. Mechanisms occurring during the photo-patterning procedure and a post-patterning thermal treatment have been studied by Fourier transform infrared spectroscopy, atomic force microscopy, X-ray diffraction, and ellipsometry. Discussions are proposed to support the influence of the photo-patterning procedure and post-patterning treatment on the shape and the dimension of so-formed microstructures. Original additional functionalities arising from such structures are also presented.

引用

页码：1474 / 1486

页数：13

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