Low Leakage Current Density Behaviour of Nanofilms PbTiO3 Based MIM Capacitor

被引:0
作者
Nurbaya, Z. [1 ,3 ]
Rusop, M. [1 ,2 ]
机构
[1] Univ Teknol MARA UiTM, NANO ElecT Ctr NET, Fac Elect Engn, Shah Alam 40450, Selangor, Malaysia
[2] Univ Teknol MARA UiTM, NANO Sci Tech Ctr NST, Inst Sci, Shah Alam 40450, Selangor, Malaysia
[3] UTM, Razak Sch Engn & Adv Technol, Kuala Lumpur 54100, Malaysia
关键词
Lead Titanate; Dielectric Property; Microstructural Property; I-V Characteristic; TITANATE THIN-FILMS; SOL-GEL; ELECTRICAL-PROPERTIES; FERROELECTRIC PROPERTIES; PB(ZR; TI)O-3; FILMS; LEAD; CRYSTALLIZATION; ELECTRODES; DEPOSITION; SUBSTRATE;
D O I
10.1166/asl.2014.5712
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Lead titanate (PbTiO3) has been precisely studied on the films preparation for the purpose towards complex storage applications such as capacitor, transistor, and ferroelectric random access memory. In the need to have high quality (PbTiO3) thin films, the lead (Pb) volatilization seems necessary to be realized at first place. Therefore the problem can be solved by addition of Pb content and also controlling the microstructural property during annealing treatment. I-V characteristic of the films prepared at different Pb content showed improvement where indication of low leakage current plus play impressively high resistive films around similar to 10(-9) A and similar to 10(6) Omega. cm(2) respectively. This significant improvement attributed to the low dielectric loss, tan delta (0.1) plus high dielectric constant, k value (151) which is at frequency dependency. The thin films surface roughness of PbTiO3 were observed by atomic force microscopy (AFM) that being determined by direct sensed on peaks and valleys of the crystal structures. The experimental method for preparing the films was done through sol gel, spin coating method at repetition of coating layers and involved low synthesis temperature for crystallization process.
引用
收藏
页码:2258 / 2263
页数:6
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