Wet chemistry of surface modification on Si semiconductors

被引：0
|
作者：
Tiruneh, Lielena M. [1 ]
Chabal, Yves [1 ]
Thiessen, Peter [1 ]
Seitz, Oliver [1 ]
机构：
[1] Univ Texas Dallas, Richardson, TX 75083 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2011年 / 241卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
777-CHED
引用
收藏
页数：1
相关论文
共 50 条
  • [21] Wet oxidation for detecting surface defect pits of AlGaAs related semiconductors
    Peng, CS
    Konttinen, J
    Jouhti, T
    Liu, HF
    Pessa, M
    JOURNAL OF CRYSTAL GROWTH, 2005, 274 (1-2) : 138 - 143
  • [22] The impact of surface chemistry modification on macrophage polarisation
    Rostam, Hassan M.
    Singh, Sonali
    Salazar, Fabian
    Magennis, Peter
    Hook, Andrew
    Singh, Taranjit
    Vrana, Nihal E.
    Alexander, Morgan R.
    Ghaemmaghami, Amir M.
    IMMUNOBIOLOGY, 2016, 221 (11) : 1237 - 1246
  • [23] Synthesis and surface modification by macromolecular plasma chemistry
    Denes, F
    TRENDS IN POLYMER SCIENCE, 1997, 5 (01) : 23 - 31
  • [24] Nanotribological improvements due to surface chemistry modification
    Scherge, M
    Li, X
    Schaefer, JA
    FUNDAMENTALS OF NANOINDENTATION AND NANOTRIBOLOGY, 1998, 522 : 481 - 486
  • [25] New chemistry for surface modification of polyethylene.
    Bergbreiter, DE
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 220 : U318 - U318
  • [26] Improvement of EUV Si hardmask performance through wet chemistry functionalization
    Liang, Yichen
    Chacko, Andrea M.
    Oelklaus, Samantha
    Lowrey, Ethan
    Van Driessche, Veerle
    Sedlacek, Ivan R.
    Luo, Ming
    Grannemann, Stephen M.
    Guerrero, Douglas J.
    ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXVII, 2020, 11326
  • [27] Modification of the Surface Electronic Properties of Semiconductors by the Action of Gases.
    Lassabatere, L.
    Vide, les Couches Minces, 1982, 37 (210): : 41 - 50
  • [28] Surface chemistry for modification and tuning of polymer CORALS
    Sidorenko, Alexander
    Moore, Preston
    McConnell, Caitlyn
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2019, 258
  • [29] Modification and chemical transformation of Si(111) surface
    Liu, Yang
    Yamazaki, Shoko
    Izuhara, Suguru
    JOURNAL OF ORGANOMETALLIC CHEMISTRY, 2006, 691 (26) : 5809 - 5824
  • [30] WET-PROCESS SURFACE MODIFICATION OF POLYIMIDES - ADHESION IMPROVEMENT
    LEE, KW
    KOWALCZYK, SP
    ACS SYMPOSIUM SERIES, 1990, 440 : 179 - 195
12345