Depth profiling of hydrogen and oxygen in ferroelectric films using high-energy ion beam

被引：0
作者：
Kaneko, T
Watamori, M
Makita, H
Araujo, C
Kano, G
机构：
[1] Kochi Univ Technol, Dept Elect & Photon Syst Engn, Kochi 7828502, Japan
[2] Kochi Univ Technol, Grad Sch, Kochi 7828502, Japan
[3] Univ Colorado, Coll Engn & Appl Sci, Colorado Springs, CO 80933 USA
来源：
INTEGRATED FERROELECTRICS | 2003年 / 53卷
关键词：
RBS; ERD; hydrogen; depth profiling; SBT;
D O I：
10.1080/10584580390258336
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A characterization technique for oxide ferroelectric materials using high-energy ion beam is presented. In this study, depth profiles of chemical elements are obtained for SBT films grown by MOD method and by MOCVD method respectively. Hydrogen depth profiles are taken by ERD technique with an Al absorber foil. Depth profiles of other elements are determined with RBS technique. For the MOD-grown sample, the elemental amount ratio was determined as Sr1.00Bi2.06 +/- 0.03Ta2.02 +/- 0.03O8.33 +/- 0.17. The oxygen deficiency in the MOD-grown SBT film was uniformly observed at every depths. For the MOCVD-sample and the MOD-sample, the underlying Pt electrode layers contained 4.7 at.% and 3.8 at.% of hydrogen respectively.
引用
收藏
页码：391 / 399
页数：9
相关论文
共 50 条
[31]   Depth profiling of hydrogen in crystalline silicon using elastic recoil detection analysis [J].
Verda, RD ;
Maggiore, CJ ;
Tesmer, JR ;
Misra, A ;
Hoechbauer, T ;
Nastasi, M ;
Bower, RW .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 183 (3-4) :401-412
[32]   Depth profiling of Na in SiOx films by combination of chemical etching and secondary ion mass spectrometry [J].
Saito, R ;
Kudo, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (02) :690-694
[33]   Secondary ion mass spectrometry depth profiling of ultrathick films using an argon gas cluster source: Crater shape implications on the analysis area as a function of depth [J].
Muramoto, Shin ;
Collett, Cayla .
SURFACE AND INTERFACE ANALYSIS, 2019, 51 (02) :145-151
[34]   Deuterium depth profiling in polymers using heavy ion elastic recoil detection [J].
Ermer, H ;
Pfaff, O ;
Straub, W ;
Geoghegan, M ;
Brenn, R .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 134 (02) :237-248
[35]   Analyses of hydrogen in quartz and in sapphire using depth profiling by ERDA at atmospheric pressure: Comparison with resonant NRA and SIMS [J].
Reiche, Ina ;
Castaing, Jacques ;
Calligaro, Thomas ;
Salomon, Joseph ;
Aucouturier, Marc ;
Reinholz, Uwe ;
Weise, Hans-Peter .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 249 :608-611
[36]   Hydrogen depth profiling with sub-nm resolution in high-resolution ERD [J].
Kimura, K ;
Nakajima, K ;
Imura, H .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 140 (3-4) :397-401
[37]   Chemical depth profiling on submicron regions: a combined focused ion beam scanning electron microscope approach [J].
Chan, DK ;
Misquitta, SF ;
Ying, JF ;
Martner, CC ;
Hermsmeier, BD .
SURFACE AND INTERFACE ANALYSIS, 1999, 27 (04) :199-203
[38]   Oxide scale depth profiling of lanthanum-deposited AISI-304: An ion beam analysis [J].
Ager, FJ ;
Respaldiza, MA ;
Paul, A ;
Odriozola, JA ;
da Silva, MF ;
Soares, JC .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 136 :1045-1051
[39]   Depth profiling of defects in argon irradiated silicon using positron beam facility at Kalpakkam [J].
Amarendra, G ;
Rao, GV ;
Nair, KGM ;
Viswanathan, B .
POSITRON ANNIHILATION: ICPA-11 - PROCEEDINGS OF THE 11TH INTERNATIONAL CONFERENCE ON POSITRON ANNIHILATION, KANSAS CITY, MISSOURI, USA, MAY 1997, 1997, 255-2 :650-652
[40]   Ordering effects in extreme high-resolution depth profiling with MeV ion beams [J].
Whitlow, Harry J. ;
Nakagawa, Sachiko T. .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 272 :430-432
12345