Growth kinetics and morphological analysis of homoepitaxial GaAs fins by theory and experiment

被引:36
作者
Albani, Marco [1 ,2 ]
Ghisalberti, Lea [3 ]
Bergamaschini, Roberto [1 ,2 ]
Friedl, Martin [3 ]
Salvalaglio, Marco [4 ]
Voigt, Axel [4 ,5 ]
Montalenti, Francesco [1 ,2 ]
Tutuncuoglu, Gozde [3 ,6 ]
Fontcuberta i Morral, Anna [3 ]
Miglio, Leo [1 ,2 ]
机构
[1] Univ Milano Bicocca, L NESS, I-20125 Milan, Italy
[2] Univ Milano Bicocca, Dept Mat Sci, I-20125 Milan, Italy
[3] Ecole Polytech Fed Lausanne, Lab Semicond Mat, CH-1015 Lausanne, Switzerland
[4] Tech Univ Dresden, Inst Sci Comp, D-01062 Dresden, Germany
[5] Tech Univ Dresden, Dresden Ctr Computat Mat Sci DCMS, D-01062 Dresden, Germany
[6] Georgia Inst Technol, Filler Lab, Chem & Biomol Engn, Atlanta, GA 30332 USA
基金
瑞士国家科学基金会;
关键词
THIN CRYSTALLINE FILMS; VAPOR-PHASE EPITAXY; SURFACE EVOLUTION; FIELD MODEL; EQUILIBRIUM; NANOWIRES; SHAPES; DIFFUSION;
D O I
10.1103/PhysRevMaterials.2.093404
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nanoscale membranes have emerged as a new class of vertical nanostructures that enable the integration of horizontal networks of III-V nanowires on a chip. To generalize this method to the whole family of III-Vs, progress in the understanding of the membrane formation by selective area epitaxy in oxide slits is needed, in particular for different slit orientations. Here, it is demonstrated that the shape is primarily driven by the growth kinetics rather than determined by surface energy minimization as commonly occurs for faceted nanostructures. To this end, a phase-field model simulating the shape evolution during growth is devised, in agreement with the experimental findings for any slit orientations, even when the vertical membranes turn into multifaceted fins. This makes it possible to reverseengineer the facet-dependent incorporation times, which were so far unknown, even for common low-index facets. The compelling reproduction of the experimental morphologies demonstrates the reliability of the growth model and offers a general method to determine microscopic kinetic parameters governing out-of-equilibrium three-dimensional growth.
引用
收藏
页数:10
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