Semiconductor Gas Sensors: Dry Synthesis and Application

被引：494

作者：

Tricoli, Antonio ^{[1
]}

Righettoni, Marco ^{[1
]}

Teleki, Alexandra ^{[1
]}

机构：

[1] ETH, Dept Mech & Proc Engn, CH-8092 Zurich, Switzerland

来源：

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION | 2010年 / 49卷 / 42期

关键词：

aerosols; nanomaterials; semiconductors; sensors; SNO2; THIN-FILMS; CHEMICAL-VAPOR-DEPOSITION; SITU THERMOPHORETIC DEPOSITION; PULSED-LASER DEPOSITION; FLAME AEROSOL SYNTHESIS; SENSITIZED SOLAR-CELLS; TIN OXIDE-FILMS; SENSING PROPERTIES; DOPED SNO2; SPUTTERED FILMS;

D O I：

10.1002/anie.200903801

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Sense and sensitivity: Dry processes allow the rapid and scalable synthesis of nanostructured metal oxide films for use as semiconductor-based gas sensors. Dense, particulate, or porous films, with thicknesses in the nm-μm range can be prepared by the appropriate synthesis and deposition method. A wide variety of oxides with controlled properties (see pictures) are obtained, allowing miniature sensing devices with improved sensitivity and stability to be developed. © 2010 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：7632 / 7659

页数：28

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