Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators

被引：35

作者：

Caruntu, Dumitru I. ^{[1
]}

Oyervides, Reynaldo ^{[1
]}

机构：

[1] Univ Texas Rio Grande Valley, Dept Mech Engn, Edinburg, TX 78539 USA

来源：

COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION | 2017年 / 43卷

关键词：

Primary resonance; MEMS circular plate resonators; Reduced order model; Soft AC electrostatic actuation; BEHAVIOR;

D O I：

10.1016/j.cnsns.2016.06.032

中图分类号：

O29 [应用数学];

学科分类号：

070104 ;

摘要：

This paper deals with the amplitude-frequency response of soft AC electrostatically actuated MEMS clamped circular plates. Alternating Current (AC) frequency is near half natural frequency of the plate. This results in primary resonance of the system. Two methods are used and compared, namely the Method of Multiple Scales (MMS), and Reduced Order Model (ROM). Both methods are in excellent agreement for amplitudes less than 0.4 of the gap. For amplitudes between 0.4 and 1 of the gap only seven terms ROM accurately predicts the behavior of the system. The effects of the voltage and damping parameters on the frequency response are reported. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：261 / 270

页数：10

共 28 条

[1] Natural frequencies of heated annular and circular plates [J].

Arafat, HN ;

Nayfeh, AH ;

Faris, W .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2004, 41 (11-12) :3031-3051

[2] Measurement of Poisson's ratio by means of a direct tension test on micron-sized specimens [J].

Banks-Sills, Leslie ;

Hikri, Yael ;

Krylov, Slava ;

Fourman, Victor ;

Gerson, Yuval ;

Bruck, Hugh A. .

SENSORS AND ACTUATORS A-PHYSICAL, 2011, 169 (01) :98-114

[3]

Caruntu D.I., 2014, SHOCK VIB, V2014, P1

[4] Self-adjoint differential equations for classical orthogonal polynomials [J].

Caruntu, DI .

JOURNAL OF COMPUTATIONAL AND APPLIED MATHEMATICS, 2005, 180 (01) :107-118

[5]

Caruntu DI, 2014, J COMPUT NONLIN DYN, V11

[6] Classical Jacobi polynomials, closed-form solutions for transverse vibrations [J].

Caruntu, Dumitru I. .

JOURNAL OF SOUND AND VIBRATION, 2007, 306 (3-5) :467-494

[7] Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect [J].

Caruntu, Dumitru I. ;

Luo, Le .

MECCANICA, 2017, 52 (4-5) :849-859

[8] Frequency response of primary resonance of electrostatically actuated CNT cantilevers [J].

Caruntu, Dumitru I. ;

Luo, Le .

NONLINEAR DYNAMICS, 2014, 78 (03) :1827-1837

[9] Reduced order model of parametric resonance of electrostatically actuated MEMS cantilever resonators [J].

Caruntu, Dumitru I. ;

Martinez, Israel .

INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS, 2014, 66 :28-32

[10] Eigenvalue singular problem of factorized fourth-order self-adjoint differential equations [J].

Caruntu, Dumitru I. .

APPLIED MATHEMATICS AND COMPUTATION, 2013, 224 :603-610

← 1 2 3 →