The Effect of Deposition Temperature to Photoconductivity Properties of Amorphous Carbon Thin Films Deposited By Thermal CVD

被引：0
作者：
Mohamad, F. [1 ,2 ]
Suriani, A. B. [2 ]
Noor, U. M. [1 ]
Rusop, M. [1 ,2 ]
机构：
[1] Univ Teknol MARA, Fac Elect Engn, Solar Cell Lab, Shah Alam, Selangor, Malaysia
[2] Univ Teknol MARA, Inst Sci, NANO SciTech Ctr, Shah Alam, Selangor, Malaysia
来源：
PROGRESS OF PHYSICS RESEARCH IN MALAYSIA, PERFIK2009 | 2010年 / 1250卷
关键词：
Camphor oil; Amorphous carbon; Thermal CVD; Photoconductivity; CHEMICAL-VAPOR-DEPOSITION; PHOTOVOLTAIC PROPERTIES; CAMPHORIC CARBON;
D O I：
10.1063/1.3469680
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Amorphous carbon (a-C) thin films were deposited by thermal chemical vapor deposition (CVD) using camphor oil on quartz substrates. The photoconductivity and optical properties of the thin films were studied with varying the deposition temperatures ranging from 650 to 900 degrees C. The film deposited at 750 degrees C shows large photoconductivity compare to other films. The optical characterization shows that the optical band gap of the thin films decreased from 0.65 to similar to 0.0eV with increasing the deposition temperature due to the increase of sp(2) bonded carbon configuration. The electrical conductivity of the thin films grown at higher temperature is much higher compared with the thin films deposited at low temperature.
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页码：361 / +
页数：2
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