An iterative method for nonlinear dynamical system of an electrostatically actuated micro-cantilever

被引：5
|
作者：
Chen, Y. M. [1 ]
Meng, G. [1 ]
Liu, J. K. [2 ]
机构：
[1] Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
[2] Sun Yat Sen Univ, Dept Mech, Guangzhou 510275, Guangdong, Peoples R China
来源：
PHYSICS LETTERS A | 2010年 / 374卷 / 34期
基金：
中国国家自然科学基金; 中国博士后科学基金;
关键词：
MEMS; Micro-cantilever; Nonlinear; Iterative method; MEMS; MICROCANTILEVERS; OSCILLATIONS; SIMULATION; DESIGN;
D O I：
10.1016/j.physleta.2010.06.068
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
This study proposes an iterative method, in which all iterations are linear, for solving the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. The presented method is further improved, so that the CPU time needed is significantly reduced. This method provides solutions in excellent agreement with numerical ones. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：3455 / 3459
页数：5
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