共 91 条
[61]
Patrick J.W., 1995, POROSITY CARBONS CHA
[69]
Quartz-crystal microbalance study for characterizing atomic oxygen in plasma ash tools
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2001, 19 (01)
:97-100
[70]
Stirling D., 2000, THE SULFUR PROBLEM, DOI [10.1039/9781847552174, DOI 10.1039/9781847552174]