Superplastic micro/nano-formability of La60Al20Ni10Co5Cu5 amorphous alloy in supercooled liquid state

被引：68

作者：

Saotome, Y

Hatori, T

Zhang, T

Inoue, A

机构：

[1] Gunma Univ, Dept Mech Engn, Kiryu, Gumma 3768515, Japan

[2] Gunma Univ, Grad Sch, Kiryu, Gumma 3768515, Japan

[3] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2001年 / 304卷 / 304-306期

关键词：

amorphous alloy; supercooled liquid; Newtonian viscous flow; micro-formability; micro-die; MEMS;

D O I：

10.1016/S0921-5093(00)01593-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

La60Al20Ni10Co5Cu5,amorphous alloy exhibits an obvious; glass transition phenomenon and supercooled liquid state over a wide temperature range. The present paper investigates the macroscopic deformation behavior and microscopic deformation behavior. On a macroscopic scale, the material exhibits a Newtonian viscous flew in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, new microforging apparatus and V-grooved micro dies of (1 0 0) Si were fabricated by a silicon process. The V-groove died are from 200 nm to 2 mum wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micromaterials for micro-electro-mechanical systems (MEMS). (C) 2001 Elsevier Science B.V All rights reserved.

引用

页码：716 / 720

页数：5

共 5 条

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[2] Inoue A., Nakamura T., Sugita T., Zhang T., Masumoto T., Mater. Trans. JIM, 34, (1993)
[3] Inoue A., Zhang T., Masumoto T., Mater. Trans. JIM, 30, (1989)
[4] Backofen W.A., Met. Eng. Quart., 10, (1970)
[5] Kimura M., Kobayashi M., Proceedings of the 39th Japanese Joint Conference for the Technology of Plasticity, (1988)

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