Preparation of ferrite-coated magnetic force microscopy cantilevers

被引：5

作者：

Kirsch, M. ^{[1
]}

Koblischka, M. R. ^{[1
]}

Wei, J. D. ^{[1
]}

Hartmann, U. ^{[1
]}

机构：

[1] Univ Saarland, Inst Expt Phys, D-66041 Saarbrucken, Germany

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2007年 / 25卷 / 05期

关键词：

D O I：

10.1116/1.2782471

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thin films of two types of ferrites, NiZnFe2O4 spinel ferrite and CO2 Z-type hexaferrite (Ba3CO2Fe24O41) were prepared by rf sputtering on Si (1 0 0) and (1 1 1) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of magnetic force microscopy (MFM) cantilever coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, the authors employ commercial, micromachined silicon cantilevers. The typical thickness of the coatings was 50 nm. The MFM imaging properties of both types of ferrite-coated cantilevers are discussed in detail. (C) 2007 American Vacuum Society.

引用

页码：1679 / 1683

页数：5

共 24 条

[1] Measuring magnetic field saturation and its site dependence in a recording head with a magnetic force microscope [J].

Abe, M ;

Tanaka, Y .

IEEE TRANSACTIONS ON MAGNETICS, 2004, 40 (03) :1708-1711

[2] A study of high-frequency characteristics of write heads with the AC-Phase high-frequency magnetic force microscope [J].

Abe, M ;

Tanaka, Y .

IEEE TRANSACTIONS ON MAGNETICS, 2002, 38 (01) :45-49

[3] High frequency write head measurement with the phase detection magnetic force microscope [J].

Abe, M ;

Tanaka, Y .

JOURNAL OF APPLIED PHYSICS, 2001, 89 (11) :6766-6768

[4] High-quality sample preparation by low kV FIB thinning for analytical TEM measurements [J].

Bals, Sara ;

Tirry, Wim ;

Geurts, Remco ;

Yang, Zhiqing ;

Schryvers, Dominique .

MICROSCOPY AND MICROANALYSIS, 2007, 13 (02) :80-86

[5] The magnetic properties of NixZn1-xFe2O4 films fabricated by alternative sputtering technology [J].

Gao, JH ;

Cui, YT ;

Yang, Z .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 110 (02) :111-114

[6]

Goldman A., 1990, MODERN FERRITE TECHN

[7] Stoner-Wohlfarth-type behavior of a close-packed array of high-anisotropy hexaferrite nanoparticles [J].

Golubenko, ZV ;

Kamzin, AS ;

Ol'khovik, LP ;

Khvorov, MM ;

Sizova, ZI ;

Shabatin, VP .

PHYSICS OF THE SOLID STATE, 2002, 44 (09) :1698-1702

[8] Magnetic force microscopy [J].

Hartmann, U .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1999, 29 :53-87

[9] Preparation of ferrite-coated MFM cantilevers [J].

Koblischka, M. R. ;

Kirsch, M. ;

Wei, J. ;

Sulzbach, T. ;

Hartmann, U. .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2007, 316 (02) :E666-E669

[10] High frequency magnetic force microscopy-imaging of harddisk write heads [J].

Koblischka, MR ;

Wei, JD ;

Kirsch, M ;

Hartmann, U .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (3B) :2238-2241

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