Room temperature Si δ-growth on Ge incorporating high-K dielectric for metal oxide semiconductor applications

被引：6

作者：

Hong, Augustin J. ^{[1
]}

Ogawa, Masaaki ^{[1
]}

Wang, Kang L. ^{[1
]}

Wang, Yong ^{[2
,3
]}

Zou, Jin ^{[2
,3
]}

Xu, Zheng ^{[4
]}

Yang, Yang ^{[4
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

[2] Univ Queensland, Sch Engn, Brisbane, Qld 4072, Australia

[3] Univ Queensland, Ctr Microscopy & Microanal, Brisbane, Qld 4072, Australia

[4] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 02期

基金：

美国国家科学基金会; 澳大利亚研究理事会;

关键词：

D O I：

10.1063/1.2957476

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A low temperature Al2O3/4 monolayer amorphous Si gate stack process was demonstrated on p-type Ge wafers using atomic layer deposition and molecular beam epitaxy. Multifrequency capacitance-voltage (C-V) and current-voltage (I-V) characteristics showed excellent electrical properties of the Pt/Al2O3/4 ML Si/Ge metal oxide semiconductor capacitor. No kinks from 1 MHz to 4 kHz and a leakage current density of 2.6 x 10(-6) A/cm(2) at 1 V with an equivalent oxide thickness of 2.5 nm. The interface characterization using a conductance method showed that interface trap density at the near midgap was 8 x 10(12) eV(-1) cm(-2) and a mean capture cross section of holes was extracted to be 10(-16) cm(2). (C) 2008 American Institute of Physics.

引用

页数：3

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