共 50 条
- [1] A In-Situ Measuring Method for Stress Gradient of a MEMS Film MICRO AND NANO TECHNOLOGY: 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT), 2009, 60-61 : 357 - 360
- [2] An In-situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency MICRO-NANO TECHNOLOGY XIII, 2012, 503 : 308 - +
- [3] An In-situ Method for Comparing Thermal Conductivity of Insulation Film in MEMS Proceedings of the 2016 International Symposium on Advances in Electrical, Electronics and Computer Engineering (ISAEECE), 2016, 69 : 95 - 98
- [4] Ultrasonic method for measuring in-situ stress based on acoustoelasticity theory Yanshilixue Yu Gongcheng Xuebao/Chinese Journal of Rock Mechanics and Engineering, 2006, 25 (SUPPL. 2): : 3719 - 3724
- [6] NEW METHOD FOR MEASURING TWO-DIMENSIONAL CHANGE OF IN-SITU STRESSES DURING EXCAVATIONS: A STUDY ON THE METHOD FOR MEASURING IN-SITU STRESS CHANGES WITH PRESSURE CELL (1ST REPORT). Nihon Kogyokaishi, 1987, 103 (1195): : 543 - 547
- [7] An in-situ method for measuring the wafer flatness Guangzi Xuebao/Acta Photonica Sinica, 2006, 35 (12): : 1975 - 1979
- [9] Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius MICRO-NANO TECHNOLOGY XIII, 2012, 503 : 381 - 385
- [10] Yield strength determination of TiN film by in-situ XRD stress analysis method ECRS 6: PROCEEDINGS OF THE 6TH EUROPEAN CONFERENCE ON RESIDUAL STRESSES, 2002, 404-7 : 671 - 676