Studies of ion irradiation effects in hydrogenated amorphous carbon thin films by X-ray absorption and photoemission spectroscopy

被引：9

作者：

Ray, S. C. ^{[1
]}

Kumar, K. P. Krishna ^{[1
]}

Tsai, H. M. ^{[1
]}

Chiou, J. W. ^{[1
]}

Pao, C. W. ^{[1
]}

Pong, W. F. ^{[1
]}

Tsai, M. -H. ^{[2
]}

Wu, B. -H. ^{[3
]}

Sheu, C. -R. ^{[3
]}

Chen, C. -C. ^{[4
]}

Hong, Franklin C. -N. ^{[4
]}

Cheng, H. -H. ^{[5
]}

Dalakyan, A. ^{[5
]}

机构：

[1] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan

[2] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan

[3] Taiwan TFT LCD Associat, Hsinchu 300, Taiwan

[4] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 701, Taiwan

[5] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 106, Taiwan

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 10期

关键词：

diamond like carbon; thin films; X-ray absorption near-edge structure; valence-band photoelectron spectroscopy;

D O I：

10.1016/j.tsf.2007.10.020

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

C K-edge X-ray absorption near-edge structure (XANES) and valence-band photoemission spectroscopy (PES) measurements were taken for hydrogenated amorphous carbon films before and after ion beam irradiation. The C K-edge XANES and valence-band PES spectra indicate that irradiation breaks C-C bonds to form C=C bonds and has a similar effect on the electronic structures of the films, irrespective of the hydrogen content. The valence-band PES measurements reveal that ion beam irradiation markedly enhances the density of carbon pi states in the vicinity of the Fermi level. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：3374 / 3377

页数：4

共 18 条

[1] Valence band spectra of nitrogen incorporated amorphous carbon films [J].