Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy

被引:198
作者
Jackman, RJ
Floyd, TM
Ghodssi, R
Schmidt, MA
Jensen, KF
机构
[1] MIT, Dept Chem Engn, Cambridge, MA 02139 USA
[2] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
关键词
D O I
10.1088/0960-1317/11/3/316
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes a method for fabricating microfluidic devices in a photodefinable epoxy (SU-8). This technique is compatible with, and complementary to, conventional fabrication techniques. It allows microstructures formed in SU-8 to be bonded to produce sealed microfluidic channels. A micromixer fabricated entirely in SU-8, using this technique, for performing liquid-phase reactions is shown to be suitable for visible spectroscopy. This fabrication method also allows the incorporation of materials that are often difficult to integrate. By fabricating hybrid devices that incorporate quartz windows, we demonstrate that these devices are compatible with organic solvents and that in situ ultraviolet detection in a microfluidic system is possible.
引用
收藏
页码:263 / 269
页数:7
相关论文
共 23 条
  • [1] Electric impedance spectroscopy using microchannels with integrated metal electrodes
    Ayliffe, HE
    Frazier, AB
    Rabbitt, RD
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1999, 8 (01) : 50 - 57
  • [2] Influence of coil power on the etching characteristics in a high density plasma etcher
    Ayón, AA
    Braff, RA
    Bayt, R
    Sawin, HH
    Schmidt, MA
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (07) : 2730 - 2736
  • [3] Becker H, 2000, MESA MG, P253
  • [4] Low temperature quartz-to-silicon bonding for SAW applications
    Berthold, A
    Sarro, PM
    Vellekoop, MJ
    [J]. SMART STRUCTURES AND MATERIALS 1998: SMART ELECTRONICS AND MEMS, 1998, 3328 : 81 - 85
  • [5] High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
    Despont, M
    Lorenz, H
    Fahrni, N
    Brugger, J
    Renaud, P
    Vettiger, P
    [J]. MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 518 - 522
  • [6] Rapid prototyping of microfluidic systems in poly(dimethylsiloxane)
    Duffy, DC
    McDonald, JC
    Schueller, OJA
    Whitesides, GM
    [J]. ANALYTICAL CHEMISTRY, 1998, 70 (23) : 4974 - 4984
  • [7] FLOYD TM, 1999, 3 INT C MICR TECHN, P171
  • [8] GUERIN LJ, 1997, INT C SOL STAT SENS, P1419
  • [9] Buried microchannels in photopolymer for delivering of solutions to neurons in a network
    Heuschkel, MO
    Guerin, L
    Buisson, B
    Bertrand, D
    Renaud, P
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) : 356 - 361
  • [10] Microchemical systems: Status, challenges, and opportunities
    Jensen, KF
    [J]. AICHE JOURNAL, 1999, 45 (10) : 2051 - 2054