Integrated Optical and Electrical Analysis: Identifying Location and Properties of Traps in AlGaN/GaN HEMTs During Electrical Stress

被引:121
作者
Tapajna, Milan [1 ]
Simms, Richard J. T. [1 ]
Pei, Yi [2 ]
Mishra, Umesh K. [2 ]
Kuball, Martin [1 ]
机构
[1] Univ Bristol, HH Wills Phys Lab, Bristol BS8 1TL, Avon, England
[2] Univ Calif Santa Barbara, Elect & Comp Engn Dept, Santa Barbara, CA 93106 USA
关键词
Electrical stress; electroluminescence (EL); GaN high-electron mobility transistor (HEMT); impurity diffusion; reliability; trapping; POWER; GAN;
D O I
10.1109/LED.2010.2047092
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new methodology is developed to determine spatial location and properties of traps generated by electrical stressing of AlGaN/GaN high-electron mobility transistors, based on integrated optical and electrical analysis. Mild OFF-state stress increases irreversibly the number of traps located in the near-surface AlGaN region at the gate edge. A deep level with 0.45-eV activation energy in fresh devices changes its nature to interacting defect after the OFF-state stress, accompanied by an activation energy change. These results are consistent with trap generation in the near-surface AlGaN region at the gate edge related to high electric field and gate leakage current, as stressing does not result in the generation of cracks in the AlGaN layer.
引用
收藏
页码:662 / 664
页数:3
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