Properties of DLC films produced by pulsed laser induced arc deposition

被引：0

作者：

Jiang, NN ^{[1
]}

Shao, TM ^{[1
]}

Chen, DR ^{[1
]}

机构：

[1] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China

来源：

PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5 | 2005年 / 475-479卷

关键词：

laser induced arc deposition; diamond like carbon; property;

D O I：

10.4028/www.scientific.net/MSF.475-479.3901

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp(3) structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.

引用

页码：3901 / 3904

页数：4

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