Direct observation of hydrogen etching anisotropy on diamond single crystal surfaces

被引：71

作者：

Cheng, CL ^{[1
]}

Chang, HC ^{[1
]}

Lin, JC ^{[1
]}

Song, KJ ^{[1
]}

Wang, JK ^{[1
]}

机构：

[1] NATL TAIWAN UNIV,CTR CONDENSED MATTER SCI,TAIPEI 106,TAIWAN

来源：

PHYSICAL REVIEW LETTERS | 1997年 / 78卷 / 19期

关键词：

D O I：

10.1103/PhysRevLett.78.3713

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Etching of natural diamonds by atomic hydrogen has been investigated on C(100), C(110), and C(111) single crystal surfaces. Infrared absorption spectroscopy and low-energy electron diffraction provide direct evidence for an etching anisotropy at 1100 K. The results indicate that, in the presence of atomic hydrogen, {111}-oriented facet formation irreversibly occurs on both C(110) and C(100), whereas C(111) remains intact. The finding has important implications for chemical vapor deposition diamond synthesis and H-plasma surface polishing.

引用

页码：3713 / 3716

页数：4

共 26 条

[1] HIGH-RESOLUTION ELECTRON-ENERGY-LOSS SPECTROSCOPIC STUDY OF EPITAXIALLY GROWN DIAMOND (111) AND (100) SURFACES [J].

AIZAWA, T ;

ANDO, T ;

KAMO, M ;

SATO, Y .

PHYSICAL REVIEW B, 1993, 48 (24) :18348-18351

[2] VIBRATIONAL SUM-FREQUENCY GENERATION SPECTROSCOPY OF A HOMOEPITAXIALLY-GROWN DIAMOND C(100) SURFACE [J].

ANZAI, T ;

MAEOKA, H ;

WADA, A ;

DOMEN, K ;

HIROSE, C ;

ANDO, T ;

SATO, Y .

JOURNAL OF MOLECULAR STRUCTURE, 1995, 352 :455-463

[3] ROLE OF BOND-STRAIN IN THE CHEMISTRY OF HYDROGEN ON THE SI(100) SURFACE [J].

BOLAND, JJ .

SURFACE SCIENCE, 1992, 261 (1-3) :17-28

[4] INFRARED-SPECTROSCOPY AND VIBRATIONAL-RELAXATION OF CHX-STRETCHES AND CDX-STRETCHES ON SYNTHETIC DIAMOND NANOCRYSTAL SURFACES [J].

CHANG, HC ;

LIN, JC ;

WU, JY ;

CHEN, KH .

JOURNAL OF PHYSICAL CHEMISTRY, 1995, 99 (28) :11081-11088

[5] Characterization of CH stretches on diamond C(111) single- and nanocrystal surfaces by infrared absorption spectroscopy [J].

Cheng, CL ;

Lin, JC ;

Chang, HC ;

Wang, JK .

JOURNAL OF CHEMICAL PHYSICS, 1996, 105 (19) :8977-8978

[6] INTERACTION OF ATOMIC-HYDROGEN WITH THE DIAMOND C(111) SURFACE STUDIED BY INFRARED-VISIBLE SUM-FREQUENCY-GENERATION SPECTROSCOPY [J].

CHIN, RP ;

HUANG, JY ;

SHEN, YR ;

CHUANG, TJ ;

SEKI, H .

PHYSICAL REVIEW B, 1995, 52 (08) :5985-5995

[7] VIBRATIONAL-SPECTRA OF HYDROGEN ON DIAMOND C(111)-(1X1) [J].

CHIN, RP ;

HUANG, JY ;

SHEN, YR ;

CHUANG, TJ ;

SEKI, H ;

BUCK, M .

PHYSICAL REVIEW B, 1992, 45 (03) :1522-1524

[8] F-2, H2O, and O-2 etching rates of diamond and the effects of F-2, HF and H2O on the molecular O-2 etching of (110) diamond [J].

Chu, CJ ;

Pan, C ;

Margrave, JL ;

Hauge, RH .

[9] SURFACE ROUGHENING, MELTING, AND FACETING [J].

CONRAD, EH .

PROGRESS IN SURFACE SCIENCE, 1992, 39 (01) :65-116

[10] TIGHT-BINDING STUDY OF HYDROGEN ON THE C(111), C(100), AND C(110) DIAMOND SURFACES [J].

DAVIDSON, BN ;

PICKETT, WE .

PHYSICAL REVIEW B, 1994, 49 (16) :11253-11267

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