Creating three-dimensional polymeric microstructures by multi-beam interference lithography

被引：39

作者：

Moon, JH ^{[1
]}

Yang, S ^{[1
]}

机构：

[1] Univ Penn, Dept Mat Sci & Engn, Philadelphia, PA 19104 USA

来源：

JOURNAL OF MACROMOLECULAR SCIENCE-POLYMER REVIEWS | 2005年 / C45卷 / 04期

基金：

新加坡国家研究基金会;

关键词：

multi-beam interference; lithography; 2D and 3D microstructures; maskless; photoresist; negative-tone; positive-tone; organic-inorganic hybrids; holographic polymer-dispersed liquid crystals;

D O I：

10.1080/15321790500304163

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

It is attractive to produce true three-dimensional (3D) microstructures both rapidly and economically over a large area with negligible defects for a wide range of applications. Multi-beam interference lithography is one of the promising techniques that can create periodic microstructures in polymers without extensive lithography and etching steps. This review discusses the formation of interference patterns, their dependence on beam parameters, the lithographic process, and the applications to the formation of photonic crystals. Various photoresist systems, including thick films of negative-tone and positive-tone photoresists, liquid resins, organic-inorganic hybrids, and holographic polymer-dispersed liquid crystals, are also reviewed.

引用

页码：351 / 373

页数：23

共 103 条

[1] Cell culture: Biology's new dimension [J].

Abbott, A .

NATURE, 2003, 424 (6951) :870-872

[2] Disruption of 3D tissue integrity facilitates adenovirus infection by deregulating the coxsackievirus and adenovirus receptor [J].

Anders, M ;

Hansen, R ;

Ding, RX ;

Rauen, KA ;

Bissell, MJ ;

Korn, WM .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2003, 100 (04) :1943-1948

[3] Microassembly of semiconductor three-dimensional photonic crystals [J].

Aoki, K ;

Miyazaki, HT ;

Hirayama, H ;

Inoshita, K ;

Baba, T ;

Sakoda, K ;

Shinya, N ;

Aoyagi, Y .

NATURE MATERIALS, 2003, 2 (02) :117-121

[4] Fabrication of a 2D photonic bandgap by a holographic method [J].

Berger, V ;

GauthierLafaye, O ;

Costard, E .

ELECTRONICS LETTERS, 1997, 33 (05) :425-426

[5] A VISIBLE-LIGHT INITIATING SYSTEM FOR FREE-RADICAL PROMOTED CATIONIC POLYMERIZATION [J].

BI, YB ;

NECKERS, DC .

MACROMOLECULES, 1994, 27 (14) :3683-3693

[6] Cationic UV cure kinetics for multifunctional epoxies [J].

Boey, F ;

Rath, SK ;

Ng, AK ;

Abadie, MJM .

JOURNAL OF APPLIED POLYMER SCIENCE, 2002, 86 (02) :518-525

[7] Polarization-selective switching in holographically formed polymer dispersed liquid crystals [J].

Boiko, Y ;

Eakin, J ;

Vedrine, J ;

Crawford, GP .

OPTICS LETTERS, 2002, 27 (19) :1717-1719

[8] Holographic polymer-dispersed liquid crystals (H-PDLCs) [J].

Bunning, TJ ;

Natarajan, LV ;

Tondiglia, VP ;

Sutherland, RL .

ANNUAL REVIEW OF MATERIALS SCIENCE, 2000, 30 :83-115

[9] What kind of Bravais lattices can be made by the interference of four umbrellalike beams? [J].

Cai, LZ ;

Yang, XL ;

Liu, Q ;

Wang, YR .

OPTICS COMMUNICATIONS, 2003, 224 (4-6) :243-246

[10] Formation of three-dimensional periodic microstructures by interference of four noncoplanar beams [J].

Cai, LZ ;

Yang, XL ;

Wang, YR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2002, 19 (11) :2238-2244

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