Multiple-sensor silicon chip for intelligent and cost-effective chemical sensing

被引：0
作者：
Wang, XD
Liu, CC
Hughes, HG
机构：
来源：
PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON MICROSTRUCTURES AND MICROFABRICATED SYSTEMS | 1997年 / 97卷 / 05期
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D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
A study of a multiple-sensor semiconductor chip that has been developed using silicon-based microfabrication and micromachining techniques is presented. The prototype device consists of both chemical and physical sensors, such as tin oxide sensors, calorimetric sensors and flow sensor. The individual sensor fabrication processes and the process integration method have been established. The results of the sensor design, process integration and preliminary testing suggest that manufacturability of a practical, integrated multifunctional array multiple sensors is evident.
引用
收藏
页码：199 / 206
页数：8
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