Multiple-sensor silicon chip for intelligent and cost-effective chemical sensing

A study of a multiple-sensor semiconductor chip that has been developed using silicon-based microfabrication and micromachining techniques is presented. The prototype device consists of both chemical and physical sensors, such as tin oxide sensors, calorimetric sensors and flow sensor. The individual sensor fabrication processes and the process integration method have been established. The results of the sensor design, process integration and preliminary testing suggest that manufacturability of a practical, integrated multifunctional array multiple sensors is evident.