Evaluation of hardness of ultrathin films by nanoindentation method

被引：0
作者：
Takai, O [1 ]
机构：
[1] Nagoya Univ, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2001年 / 46卷 / 06期
关键词：
nanoindentation; hardness; ultra-thin film; DLC; carbon nitride; quartz glass;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：447 / 454
页数：8
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