Evaluation of hardness of ultrathin films by nanoindentation method

被引：0

作者：

Takai, O ^{[1
]}

机构：

[1] Nagoya Univ, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2001年 / 46卷 / 06期

关键词：

nanoindentation; hardness; ultra-thin film; DLC; carbon nitride; quartz glass;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：447 / 454

页数：8

共 7 条

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