Capacitive tactile sensor with asymmetric electrodes for angle-detection-error alleviation

被引:28
作者
Chuang, Shi-Te [1 ]
Chandra, Mochtar [2 ]
Chen, Rongshun [1 ,2 ]
Loa, Cheng-Yao [1 ,2 ]
机构
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan
[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 300, Taiwan
关键词
Angle detection; Capacitive; Electrode; Tactile sensor; FILMS;
D O I
10.1016/j.sna.2016.09.022
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A capacitive tactile sensing unit with an asymmetric electrode arrangement to support tolerable angle detection errors (ADEs) in processes and operations was proposed and demonstrated in this study. Each capacitor in the sensing unit contains one fan-shaped electrode on top and one square-shaped electrode at the bottom with an intentional shift on the xy-plane, which alleviated the rotational misalignment and suppressed shear force ADE from more than 2.5 degrees to less than 0.4 degrees. The suppression of the ADE was realized by enlarging the sector angle of the fan-shaped electrode to 100 degrees, which provided 5 degrees clockwise and 5 degrees counterclockwise coverages for electrode alignment. Complete theoretical derivation of the relationships among the capacitors, design, simulation, and measurement was conducted in this research. Experimental results proved that this fan-shaped electrode design showed identical functionalities and sensitivities to those of the square-shaped electrode design for capacitive tactile sensing applications. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:159 / 169
页数:11
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