High quality strain-balanced InAs/InAsSb type-II superlattices grown by molecular beam epitaxy

被引:0
|
作者
Wei Guo-Shuai [1 ]
Hao Rui-Ting [1 ]
Guo Jie [1 ]
Ma Xiao-Le [1 ]
Li Xiao-Ming [1 ]
Li Yong [1 ]
Chang Fa-Ran [1 ]
Zhuang Yu [1 ]
Wang Guo-Wei [2 ,3 ]
Xu Ying-Qiang [2 ,3 ]
Niu Zhi-Chuan [2 ,3 ]
Wang Yao [4 ]
机构
[1] Yunnan Normal Univ, Sch Energy & Environm Sci, Kunming 650092, Yunnan, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, State Key Lab SLs & Microstruct, Beijing 100083, Peoples R China
[3] Univ Sci & Technol China, Synerget Innovat Ctr Quantum Informat & Quantum P, Hefei 230026, Peoples R China
[4] South China Normal Univ, South China Acad Adv Optoelect, Inst Elect Paper Displays, Natl Ctr Int Res Green Optoelect,Guangdong Prov K, Guangzhou 510006, Peoples R China
基金
中国国家自然科学基金;
关键词
InAs/InAsSb; superlattice; MBE; III-V semiconductor materials; TEMPERATURE;
D O I
10.11972/j.issn.1001-9014.2021.05.005
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper, high quality InAs/InAsSb(Ga-free) type-II superlattice were grown on GaSb substrates by molecular beam epitaxy. The superlattice layers structure consists of 100 periods with 3. 8 nm thick InAs layers and 1. 4 um InAs0.66Sb0.34 layers. A specific spike-like defect was found during experiment. The epitaxial layer was characterized and analyzed by high-resolution x-ray diffraction (HRXRD) , atomic force microscope (AFM) and Fourier transform infrared spectroscopy (FTIR). The results show that the optimized sample is almost zero lattice mismatched, the FWHM of the zeroth order SL peak is 39. 3 arcsec, the RMS surface roughness achieves around 1. 72 angstrom over an area of 10 mu mx10 mu m. The FTIR absorption spectrum shows a 50% cutoff wavelength of 4. 28 mu m. And PL spectrum shows that the peak of InAs/InAs0.66Sb0.34 SL is at 4. 58 mu m. These initial results indicate that the InAs/InAsSb SL grown is stable and reproducible, and thus is worthy of further investigation.
引用
收藏
页码:595 / 604
页数:10
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