Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation

被引:0
作者
Yang Kejun [1 ]
Tang Yan [1 ]
Hu Song [1 ]
Chen Chuyi [1 ]
机构
[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
来源
9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS | 2018年 / 10841卷
基金
中国国家自然科学基金;
关键词
Super-resolution imaging; image reconstruction; structured illumination; optical measurement; micro-nano structure; phase shifting; RESOLUTION LIMIT; LIGHT;
D O I
10.1117/12.2512326
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The structured illumination microscopy fills an unmet need for minimally invasive tools to image micrometer and nano-scale structure. However, conventional structured illumination super-resolution methods require precise phase shift of the illumination pattern, which leads to an inefficient image reconstruction process and a complicated imaging system. To solve these problems, we propose a novel image reconstruction method using only two image to acquire the frequencies beyond the diffraction limit. This method has an efficient image post-processing, which obtains extended frequencies without accurate estimation of phase-shifting. The related simulations and experiments are carried out to demonstrate the feasibility of this method.
引用
收藏
页数:7
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