ADVANCED MEMS-ELASTOMER CONFIGURATION FOR ENHANCED SURFACE PLASMON RESONANCE

被引：0

作者：

Chiu, Kuo-Feng ^{[1
]}

Hu, Yu-Tang ^{[2
]}

Kumar, Subodh ^{[3
]}

Lo, Cheng-Yao ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu, Taiwan

[3] Inst Natl Sci Appl Lyon, Lyon, France

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

关键词：

Color filter; microelectromechanical system; polydimethylsiloxane; surface plasmon resonance; strain;

D O I：

10.1109/transducers.2019.8808594

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The proportion of the isotropic strain (ISO) in a microelectromechanical system (MEMS)-elastomer hybrid configuration was enlarged from 6.99% to 98.30% to support various applications that require not only isotropic strains but also large ISOs. This achievement was realized by relocating the applied forces in a typical MEMS configuration and by modifying the shape (cross, square, and octagon) of the elastomer attached to the MEMS. The proposed configuration significantly improved the ISO, almost completely covering the active area of interest in the elastomer. Comprehensive structural analysis revealed that the proposed configuration and its enlarged ISO enhanced the color purity of a filter based on surface plasmon resonance.

引用

页码：1740 / 1743

页数：4

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