Detection of humidity by Quartz Crystal Microbalance method using thin metal base

被引：0

作者：

Ito, H ^{[1
]}

Kakuma, S ^{[1
]}

Ohba, R ^{[1
]}

Noda, K ^{[1
]}

机构：

[1] Hokkaido Univ, Fac Engn, Sapporo, Hokkaido 0608628, Japan

来源：

SICE 2004 ANNUAL CONFERENCE, VOLS 1-3 | 2004年

关键词：

crystal-oscillator; quartz crystal microbalance; thin metal base; humidity-sensor;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The sensitive humidity sensor by Quartz Crystal Microbalance (QCM) using thin metal base is presented. A humidity change is detected by an oscillation frequency change depending on the mass of the absorbed H2O molecules. As a basic characteristic, the sensitivities of platinum base was 2.56%/Hz in relative humidity range from 20 to 25%RH (20 degrees C), and 0.36%/Hz in relative humidity range from 80 to 85%RH (20 degrees C). Thus we conclude that platinum base is suitable material for a practical humidity sensor.

引用

页码：635 / 639

页数：5

共 3 条

[1] Humidity-sensitive optical absorption of Co3O4 film [J].

Ando, M ;

Kobayashi, T ;

Haruta, M .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 32 (02) :157-160

[2] A THIN-FILM POLYSULFONE-BASED CAPACITIVE-TYPE RELATIVE-HUMIDITY SENSOR [J].

KUROIWA, T ;

MIYAGISHI, T ;

ITO, A ;

MATSUGUCHI, M ;

SADAOKA, Y ;

SAKAI, Y .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) :692-695

[3] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG [J].

SAUERBREY, G .

ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02) :206-222

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