共 50 条
[21]
Quantum Electro-Mechanical Systems (QEMS)
[J].
DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III,
2004, 5276
:191-201
[25]
Performance Analysis of Nano-Electro-Mechanical-System Ultrasonic Sensor with Fringing Field Effects
[J].
Transactions on Electrical and Electronic Materials,
2021, 22
:757-763
[26]
Mechanical Response of a Piezoelectrically Sandwiched Nano-beam Based on the Nonlocal Theory
[J].
INTERNATIONAL JOURNAL OF ENGINEERING,
2013, 26 (12)
:1515-1523
[28]
Wafer-level Technology for Integration of Carbon Nanotubes into Micro-Electro-Mechanical Systems
[J].
2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS),
2016,