Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

被引：97

作者：

Su, P. ^{[1
]}

Han, Z. ^{[1
]}

Kita, D. ^{[1
]}

Becla, P. ^{[2
]}

Lin, H. ^{[1
]}

Deckoff-Jones, S. ^{[1
]}

Richardson, K. ^{[3
]}

Kimerling, L. C. ^{[1
]}

Hu, J. ^{[1
,4
]}

Agarwal, A. ^{[1
,4
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] CapeSym, Natick, MA 01760 USA

[3] Univ Cent Florida, CREOL, Coll Opt & Photon, Orlando, FL 32816 USA

[4] MIT, Mat Res Lab, 77 Massachusetts Ave, Cambridge, MA 02139 USA

来源：

APPLIED PHYSICS LETTERS | 2019年 / 114卷 / 05期

基金：

美国国家科学基金会;

关键词：

ABSORPTION-SPECTROSCOPY; PHOTODIODES; FABRICATION; SAPPHIRE; MICRO;

D O I：

10.1063/1.5053599

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result in a maximum sensitivity of 330 ppmv. Published under license by AIP Publishing.

引用

页数：4

共 37 条

[1] High performance, waveguide integrated Ge photodetectors [J].

Ahn, Donghwan ;

Hong, Ching-yin ;

Liu, Jifeng ;

Giziewicz, Wojciech ;

Beals, Mark ;

Kimerling, Lionel C. ;

Michel, Jurgen ;

Chen, Jian ;

Kartner, Franz X. .

OPTICS EXPRESS, 2007, 15 (07) :3916-3921

[2] Chalcogenide Glass Optical Waveguides for Infrared Biosensing [J].

Anne, Marie-Laure ;

Keirsse, Julie ;

Nazabal, Virginie ;

Hyodo, Koji ;

Inoue, Satoru ;

Boussard-Pledel, Catherine ;

Lhermite, Herve ;

Charrier, Joel ;

Yanakata, Kiyoyuki ;

Loreal, Olivier ;

Le Person, Jenny ;

Colas, Florent ;

Compere, Chantal ;

Bureau, Bruno .

SENSORS, 2009, 9 (09) :7398-7411

[3]

[Anonymous], 2005, Model SR810 DSP Lock-in Amplifier

[4]

Baudet E., 2017, Advanced Device Materials, V3, P23, DOI [DOI 10.1080/20550308.2017.1338211, 10.1080/20550308.2017.1338211]

[5] Evanescent wave optical micro-sensor based on chalcogenide glass [J].

Charrier, Joel ;

Brandily, Marie-Laure ;

Lhermite, Herve ;

Michel, Karine ;

Bureau, Bruno ;

Verger, Frederic ;

Nazabal, Virginie .

SENSORS AND ACTUATORS B-CHEMICAL, 2012, 173 :468-476

[6] Heterogeneously Integrated Silicon Photonics for the Mid-Infrared and Spectroscopic Sensing [J].

Chen, Yu ;

Lin, Hongtao ;

Hu, Juejun ;

Li, Mo .

ACS NANO, 2014, 8 (07) :6955-6961

[7] Chip-scale broadband spectroscopic chemical sensing using an integrated supercontinuum source in a chalcogenide glass waveguide [J].

Du, Qingyang ;

Luo, Zhengqian ;

Zhong, Huikai ;

Zhang, Yifei ;

Huang, Yizhong ;

Du, Tuanjie ;

Zhang, Wei ;

Gu, Tian ;

Hu, Juejun .

PHOTONICS RESEARCH, 2018, 6 (06) :506-510

[8] Low-loss photonic device in Ge-Sb-S chalcogenide glass [J].

Du, Qingyang ;

Huang, Yizhong ;

Li, Junying ;

Kita, Derek ;

Michon, Jerome ;

Lin, Hongtao ;

Li, Lan ;

Novak, Spencer ;

Richardson, Kathleen ;

Zhang, Wei ;

Hu, Juejun .

OPTICS LETTERS, 2016, 41 (13) :3090-3093

[9] Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip [J].

Gassenq, Alban ;

Hattasan, Nannicha ;

Cerutti, Laurent ;

Rodriguez, Jean Batiste ;

Tournie, Eric ;

Roelkens, Gunther .

OPTICS EXPRESS, 2012, 20 (11) :11665-11672

[10] On-chip chalcogenide glass waveguide-integrated mid-infrared PbTe detectors [J].

Han, Z. ;

Singh, V. ;

Kita, D. ;

Monmeyran, C. ;

Becla, P. ;

Su, P. ;

Li, J. ;

Huang, X. ;

Kimerling, L. C. ;

Hu, J. ;

Richardson, K. ;

Tan, D. T. H. ;

Agarwal, A. .

APPLIED PHYSICS LETTERS, 2016, 109 (07)

← 1 2 3 4 →