Electrical transport in metallic films

被引：44

作者：

Fan, P ^{[1
]}

Yi, K

Shao, JD

Fan, ZX

机构：

[1] Shenzhen Univ, Sch Sci, Shenzhen 518060, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, R&D Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China

来源：

JOURNAL OF APPLIED PHYSICS | 2004年 / 95卷 / 05期

关键词：

D O I：

10.1063/1.1644906

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

On the basis of the Boltzmann equation, the authors propose a model that includes scattering from both film surfaces and grain boundaries, and have studied the quasiclassical electrical transport in metallic films. The in-plane electric conductivity of metallic films is obtained, and the theoretical results are shown to be in good agreement with experimental data. We also give the relation between temperature coefficient of resistivity and thickness of metallic films and make a comparison with experiment. <(C)> 2004 American Institute of Physics.

引用

页码：2527 / 2531

页数：5

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