Bias-selectable mid-/long-wave dual band infrared focal plane array based on Type-II InAs/GaSb superlattice

被引:12
作者
Jiang, Zhi
Han, Xi
Sun, Yao-Yao
Guo, Chun-Yan
Lv, Yue-Xi
Hao, Hong-Yue
Jiang, Dong-Wei
Wang, Guo-Wei
Xu, Ying-Qiang
Niu, Zhi-Chuan [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
Infrared detector; Type II superlattice; Molecular beam epitaxy; Focal plane array; WAVELENGTH; GROWTH;
D O I
10.1016/j.infrared.2017.08.024
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this paper, a mid-Tong-wave dual-band detector which combined P pi MN structure and unipolar barrier was developed based on type-II InAs/GaSb superlattice. A relevant 320 x 256 focal plane array (FPA) was fabricated. Unipolar barrier and P pi MN structure in our dual band detector structure were used to suppress cross-talk and dark current, respectively. The two channels, with respective 50% cut-off wavelength at 4.5 mu m and 10 mu m were obtained. The peak quantum efficiency (QE) of mid wavelength infrared (MWIR) band and long wavelength infrared (LWIR) band are 53% at 3.2 mu m under no bias voltage and 40% at 6.4 mu m under bias voltage of -170 mV, respectively. And the dark current density under 0 and -170 mV of applied bias are 1.076 x 10(-5) A/cm(2) and 2.16 x 10(-4) A/cm(2). The specific detectivity of MWIR band and LWIR band are 2.15 x 10(12) cm.Hz(1/2)/W at 3.2 mu m and 2.31 x 10(10) cm.Hz(1/2)/W at 6.4 mu m, respectively, at 77 K. The specific detectivity of LWIR band maintains above 10(10) cm.Hz(1/2)/W at the wavelength range from 4.3 mu m to 10.2 mu m under -170 mV. The cross-talk, selectivity parameter at 3.0 mu m, about 0.14 was achieved under bias of -170 mV. Finally, the thermal images were taken by the fabricated FPA at 77 K. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:159 / 164
页数:6
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