A review of surface roughness generation in ultra-precision machining

被引：281
作者：
Zhang, S. J. [1 ,2 ]
To, S. [2 ,3 ]
Wang, S. J. [3 ]
Zhu, Z. W. [2 ]
机构：
[1] Nanchang Univ, Res Inst Mech Mfg Engn, Sch Mechatron Engn, Nanchang, Jiangxi, Peoples R China
[2] Hong Kong Polytech Univ, Dept Ind & Syst Engn, State Key Lab Ultra Precis Machining Technol, Hong Kong, Hong Kong, Peoples R China
[3] Guangdong Univ Technol, Sch Electromech Engn, Guangdong Prov Key Lab Micronano Mfg Technol & Eq, Guangzhou, Guangdong, Peoples R China
来源：
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE | 2015年 / 91卷
基金：
中国国家自然科学基金;
关键词：
Surface roughness; Ultra-precision machining; Surface roughness characteristics; Surface roughness formation; STRAIN PLASTIC-DEFORMATION; BRITTLE-DUCTILE TRANSITION; CUTTING FORCE VARIATION; SINGLE-CRYSTAL; TOOL WEAR; DIAMOND TOOL; CRYSTALLOGRAPHIC ORIENTATION; MATERIAL ANISOTROPY; SPINDLE VIBRATION; CHIP THICKNESS;
D O I：
10.1016/j.ijmachtools.2015.02.001
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ultra-precision machining (UPM) is capable of manufacturing a high quality surface at a nanometric surface roughness. For such high quality surface in a UPM process, due to the machining complexity any variable would be possible to deteriorate surface quality, consequently receiving much attention and interest. The general factors are summarized as machine tool, cutting conditions, tool geometry, environmental conditions, material property, chip formation, tool wear, vibration etc. This paper aims to review the current state of the art in studying the surface roughness formation and the factors influencing surface roughness in UPM. Firstly, the surface roughness characteristics in UPM is introduced. Then in UPM, a wide variety of factors for surface roughness are then reviewed in detail and the mechanism of surface roughness formation is concluded thoroughly. Finally, the challenges and opportunities faced by industry and academia are discussed and several principle conclusions are drawn. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码：76 / 95
页数：20
相关论文
共 185 条
[1]   Effects of micro-milling conditions on the cutting forces and process stability [J].
Afazov, S. M. ;
Zdebski, D. ;
Ratchev, S. M. ;
Segal, J. ;
Liu, S. .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2013, 213 (05) :671-684
[2]   Chatter modelling in micro-milling by considering process nonlinearities [J].
Afazov, S. M. ;
Ratchev, S. M. ;
Segal, J. ;
Popov, A. A. .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2012, 56 :28-38
[3]   Modeling of dynamic characteristic of the aerostatic bearing spindle in an ultra-precision fly cutting machine [J].
An, C. H. ;
Zhang, Y. ;
Xu, Q. ;
Zhang, F. H. ;
Zhang, J. F. ;
Zhang, L. J. ;
Wang, J. H. .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2010, 50 (04) :374-385
[4]  
[Anonymous], DIVIS APPL MATH
[5]  
[Anonymous], 1962, ASME J BASIC ENG
[6]  
[Anonymous], 2005, P AM SOC PRECISION E
[7]  
[Anonymous], MESOPLASTICITY ITS A
[8]  
[Anonymous], 2003, SURFACE GENERATION U
[9]  
[Anonymous], 1988, RECENR DEV PRODUCRIO
[10]  
[Anonymous], 2012, APPL MECH MAT
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