A novel high-speed polymeric EO modulator based on a combination of a microring resonator and an MZI

被引：26
作者：
Leinse, A
Diemeer, MBJ
Rousseau, A
Driessen, A
机构：
[1] Univ Twente, Integrated Opt Microsyst Grp, NL-7500 AE Enschede, Netherlands
[2] Mat Macromol Lab, F-69621 Villeurbanne, France
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 10期
关键词：
electrooptic modulation; integrated optics; microresonators; optical polymers;
D O I：
10.1109/LPT.2005.854354
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A Mach-Zehnder interferometer with an electrooptic polymer mircroring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.
引用
收藏
页码：2074 / 2076
页数：3
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