Factors influencing adhesion of fluorocarbon (FC) thin film on silicon substrate

被引：9

作者：

Gnanappa, Arun Kumar ^{[1
]}

Slattery, Orla ^{[1
]}

Peters, Frank ^{[1
]}

O'Murchu, Cian ^{[1
]}

O'Mathuna, Clan ^{[1
]}

Fahey, Robert ^{[1
]}

Taylor, J. A. ^{[2
]}

Krupenkin, Tom N. ^{[2
]}

机构：

[1] Tyndall Natl Inst, Cork, Ireland

[2] Lucent Technol Bell Labs, Murray Hill, NJ 07974 USA

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 16期

关键词：

adhesion; fluorocarbon; hydrophobic; contact angle; degradation; plasma;

D O I：

10.1016/j.tsf.2007.07.124

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hydrophobic polymeric thin films (e.g., fluorocarbon) are used in micro-fluidic applications for drag reduction. However, one of the major issues hindering their usage is reliability. Previous work shows a degradation/delamination of fluorocarbon (FC) film over a period of time. This paper investigates various processing parameters influencing the adhesion of hydrophobic FC coating to a silicon substrate. The FC film is processed using the "Bosch" process (alternating etching and deposition steps) to perform deep anisotropic silicon etching. The Si(100) wafers are first etched to a depth of about 5-10 mu m and then coated with CFx film from the C4F8 monomer. The effect of pressure, inductively coupled plasma power, thickness of the film, and the gas ratio of mixing H-2 to C4F8 has been investigated using a fractional factorial experimental design. By better understanding the effect of each input variable, the reliability of the deposited film can be improved and this is discussed in detail in this paper. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：5673 / 5680

页数：8

共 38 条

[31] MANIPULATION OF HYDROPHOBIC INTERACTIONS IN PROTEIN ADSORPTION [J].