Spectral characteristics of a radiofrequency nitrogen plasma jet continuously passing from low to atmospheric pressure

被引:0
作者
Dinescu, G
Vizireanu, S
Petcu, C
Mitu, B
Bazavan, M
Iova, I
机构
[1] Natl Inst Laser Plasma & Radiat Phys, Bucharest, Romania
[2] Univ Bucharest, Dept Phys, Magurele, Romania
来源
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2005年 / 7卷 / 05期
关键词
radiofrequency discharges; atmospheric pressure plasmas; plasma sources; nitrogen discharges;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report and discuss the characteristics of the optical emission of a radiofrequency (13.56 MHz) expanding plasma generated in nitrogen in a double chamber configuration, when the discharge passes continuously from the low pressure (10(-1) mbar) to the high pressure region (760 mbar), at constant gas mass flow. The pressure increase leads to a sudden change in plasma aspect, occurring at intermediate pressure of 200-400 torr. The plasma temperature estimation from spectral measurements indicates that the change in the aspect is accompanied by a sudden decrease of the plasma temperature.
引用
收藏
页码:2477 / 2480
页数:4
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