Large Resistance Ratio for High Reliability of Multi-Level Storage in Phase-Change Memory

被引:1
作者
Yin, You [1 ]
Noguchi, Tomoyuki [1 ]
Ohno, Hiroki [1 ]
Hosaka, Sumio [1 ]
机构
[1] Gunma Univ, Dept Prod Sci & Technol, Gunma 3768515, Japan
来源
SILICON SCIENCE AND ADVANCED MICRO-DEVICE ENGINEERING I | 2011年 / 459卷
关键词
Lateral; Double layered; Phase change memory; Multi-level storage; Reliability; CELL; FILMS;
D O I
10.4028/www.scientific.net/KEM.459.140
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Reliability (or stability) of multi-level storage (MLS) is the critical characteristics for multi-level cells. In order to improve reliability of MLS of phase-change memory, there are two effective approaches, (i) enlargement of the ratio between resistance levels and (ii) reduction of scattering of resistance level. On the basis of our experimental results, it is demonstrated that the Ge2Sb2Te5-based double-layered cell has a high ratio of highest to lowest levels up to two-to-three orders of magnitude, implying high reliability. The cells exhibit the possibility of stable switching for four-level storage.
引用
收藏
页码:140 / 144
页数:5
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