Preparation and characterization of n-type conductive (Al, Co) co-doped ZnO thin films deposited by sputtering from aerogel nanopowders

被引：84

作者：

El Mir, L. ^{[1
]}

Ben Ayadi, Z.

Saadoun, M.

Djessas, K.

von Bardeleben, H. J.

Alaya, S.

机构：

[1] Fac Sci Gabes, Lab Phys Mat Nanomat Appl Environm, Gabes 6072, Tunisia

[2] Univ Perpignan, Lab Mat Phys Syst, MEPS, F-66860 Perpignan, France

[3] Univ Paris 06, CNRS 7588, Inst Nanosci Paris, UMR, F-75015 Paris, France

来源：

APPLIED SURFACE SCIENCE | 2007年 / 254卷 / 02期

关键词：

sputtering; sol-gel method; zinc oxide; nanostructures; transparent conductive oxide (TCO);

D O I：

10.1016/j.apsusc.2007.06.028

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Highly transparent, n-type conducting ZnO thin films were obtained by low temperature magnetron sputtering of (Co, Al) co-doped ZnO nanocrystalline aerogels. The nanoparticles of similar to 30 nm size were synthesized by a sol-gel method using supercritical drying in ethyl alcohol. The structural, optical and electrical properties of the films were investigated. The ZnO films were polycrystalline textured, preferentially oriented with the (0 0 2) crystallographic direction normal to the film plane. The films show within the visible wavelength region an optical transmittance of more than 90% and a low electrical resistivity of 3.5 x 10(-4) Omega cm at room temperature. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：570 / 573

页数：4

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