Laser-fabricated axicons challenging the conventional optics in glass processing applications

被引:33
作者
Dudutis, Juozas [1 ]
Pipiras, Jokubas [1 ]
Schwarz, Simon [2 ]
Rung, Stefan [2 ]
Hellmann, Ralf [2 ]
Raciukaitis, Gediminas [1 ]
Gecys, Paulius [1 ]
机构
[1] Ctr Phys Sci & Technol, Savanoriu Ave 231, LT-02300 Vilnius, Lithuania
[2] Univ Appl Sci Aschaffenburg, Appl Laser & Photon Grp, Wurzburger Str 45, D-63743 Aschaffenburg, Germany
关键词
BESSEL BEAMS; DAMAGE THRESHOLD; FEMTOSECOND; LENS; NANOSECOND; MICROFABRICATION; DIELECTRICS; ABLATION;
D O I
10.1364/OE.377108
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Laser-based fabrication can be an alternative technology to mechanical grinding and polishing processes. However, the performance of these elements in real applications still needs to be validated. In this paper, we demonstrate that the subtractive fabrication technology is able to produce high-quality axicons from fused silica, which can be efficiently used for glass processing. We comprehensively investigate axicons, fabricated by ultrashort pulsed laser ablation with subsequent CO2 laser polishing, and compare their performance with commercially available axicons. We show that laser-fabricated axicons are comparable in quality with a precision commercial axicon. Furthermore, we demonstrate the intra-volume glass modification and dicing, utilising mJ-level laser pulses. We show that the tilting operation of the laser-fabricated axicons results in the formation of directional transverse cracks, which significantly enhance the 1 mm-thick glass dicing process. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
引用
收藏
页码:5715 / 5730
页数:16
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