Metallic Nanomeshes Fabricated by Multimechanism Directed Self-Assembly

被引：16

作者：

Liu, Runze ^{[1
]}

Huang, Hejin ^{[1
]}

Sun, Zehao ^{[1
]}

Alexander-Katz, Alfredo ^{[1
]}

Ross, Caroline A. ^{[1
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

来源：

ACS NANO | 2021年 / 15卷 / 10期

关键词：

directed self-assembly; block copolymer; dissipative particle dynamics; solvent annealing; metal infiltration; conductive nanomesh; CONSISTENT-FIELD THEORY; BLOCK-COPOLYMERS; LINE PATTERNS; FILMS; INFILTRATION; ORIENTATION; ARRAYS; SHEAR;

D O I：

10.1021/acsnano.1c05315

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The directed self-assembly of block copolymers (BCPs) is a powerful motif for the continued scaling of feature sizes for nanoscale devices. A multimechanism directed self-assembly (MMDSA) method is described that generates orthogonal meshes from a polystyrene-b-poly-2-vinylpyridine BCP that is subsequently metallized with Pt. The MMDSA process takes advantage of three different mechanisms, trench wall guidance, edge nucleation, and underlayer guidance, to align the mesh with respect to substrate features. The mechanisms and their interactions are investigated via both experiments and dissipative particle dynamics simulations. MMDSA is applied to produce well-aligned conductive nanomeshes and then is extended to fabricate multicomponent metallic structures with 2D/3D hybrid morphologies.

引用

页码：16266 / 16276

页数：11