CNTs based capacitive stretchable pressure sensor with stable performance

被引：29
作者：
Liu, Fanghua [1 ]
Dai, Shengping [2 ]
Cao, Jie [2 ]
Zhang, Zhenyuan [2 ]
Cheng, Guanggui [2 ,3 ]
Ding, Jianning [2 ,3 ]
机构：
[1] Jiangsu Univ Sci & Technol, Sch Mech Engn, Zhenjiang 212013, Jiangsu, Peoples R China
[2] Jiangsu Univ, Inst Intelligent Flexible Mechatron, Zhenjiang 212013, Jiangsu, Peoples R China
[3] Changzhou Univ, Jiangsu Collaborat Innovat Ctr Photovolta Sci & E, Changzhou 213164, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2022年 / 343卷
关键词：
Stretchable pressure sensor; Capacitive; Carbon nanotubes; Wrinkle structure; Prestretched; SKIN; STRAIN;
D O I：
10.1016/j.sna.2022.113672
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In recent years, with the increasing demand for artificial robots and smart devices, flexible pressure sensors have attracted much attention. In this paper, to solve the problem of insufficient stretchability and complicated microstructure fabrication process, a capacitive pressure sensor based on flexible electrodes with wrinkle structure and composite dielectric layer was designed and prepared. The as-prepared sensor exhibits a sensitivity of 2.13 kPa(-1) and the response time is about 0.1 s. During the loading-unloading test, the capacitive flexible sensor showed stable sensing performance and good repeatability with minor hysteresis effect. The research is of great significance for the application of flexible sensors in fields such as soft robots, E-skin and medical monitoring in the future.
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页数：8
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