Self-repair of ordered pattern of nanometer dimensions based on self-compensation properties of anodic porous alumina

被引:91
作者
Masuda, H [1 ]
Yotsuya, M
Asano, M
Nishio, K
Nakao, M
Yokoo, A
Tamamura, T
机构
[1] Tokyo Metropolitan Univ, Dept Appl Chem, Tokyo 19203, Japan
[2] NTT, Atsugi, Kanagawa 24301, Japan
关键词
D O I
10.1063/1.1344575
中图分类号
O59 [应用物理学];
学科分类号
摘要
The self-repair of an ordered pattern of nanometer dimensions based on the self-compensation properties of anodic porous alumina is demonstrated. In a pretextured pattern formed on Al using the nanoindentation process with an array of convexes, the deficiency sites of the pattern were found to be compensated automatically during the anodization. Combining the self-compensation properties of the pore configuration of the anodic porous alumina with the preparation of a replica of the compensated porous structure allowed us to develop a process which has the capability of self-repairing the imperfections in the starting pattern. It was confirmed that deficiencies in the starting pattern could be repaired automatically in the Ni pattern regenerated using the self-compensated anodic porous alumina as a template. (C) 2001 American Institute of Physics.
引用
收藏
页码:826 / 828
页数:3
相关论文
共 14 条
  • [1] Imprint lithography with 25-nanometer resolution
    Chou, SY
    Krauss, PR
    Renstrom, PJ
    [J]. SCIENCE, 1996, 272 (5258) : 85 - 87
  • [2] NATURAL LITHOGRAPHY
    DECKMAN, HW
    DUNSMUIR, JH
    [J]. APPLIED PHYSICS LETTERS, 1982, 41 (04) : 377 - 379
  • [3] SINTERED AEROSOL MASKS FOR DRY-ETCHED QUANTUM DOTS
    DEPPERT, K
    MAXIMOV, I
    SAMUELSON, L
    HANSSON, HC
    WEIDENSOHLER, A
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (24) : 3293 - 3295
  • [4] TRANSFER OF BIOLOGICALLY DERIVED NANOMETER-SCALE PATTERNS TO SMOOTH SUBSTRATES
    DOUGLAS, K
    DEVAUD, G
    CLARK, NA
    [J]. SCIENCE, 1992, 257 (5070) : 642 - 644
  • [5] FUKUDA Y, 1974, J CHEM SOC JPN, P1868
  • [6] Mold-assisted nanolithography: A process for reliable pattern replication
    Haisma, J
    Verheijen, M
    vandenHeuvel, K
    vandenBerg, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4124 - 4128
  • [7] Action of DNA repair endonuclease ERCC1/XPF in living cells
    Houtsmuller, AB
    Rademakers, S
    Nigg, AL
    Hoogstraten, D
    Hoeijmakers, JHJ
    Vermeulen, W
    [J]. SCIENCE, 1999, 284 (5416) : 958 - 961
  • [8] STRUCTURAL FEATURES OF OXIDE COATINGS ON ALUMINIUM
    KELLER, F
    HUNTER, MS
    ROBINSON, DL
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1953, 100 (09) : 411 - 419
  • [9] Direct nanomolding of semiconductor single crystals
    Masuda, H
    Yasui, K
    Yanagishita, T
    Nakao, M
    Tamamura, T
    Nishio, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2000, 39 (3AB): : L256 - L258
  • [10] Highly ordered nanochannel-array architecture in anodic alumina
    Masuda, H
    Yamada, H
    Satoh, M
    Asoh, H
    Nakao, M
    Tamamura, T
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (19) : 2770 - 2772