A unified short-channel compact model for cylindrical surrounding-gate MOSFET

被引:30
作者
Cousin, Bastien [1 ,2 ]
Reyboz, Marina [2 ]
Rozeau, Olivier [1 ]
Jaud, Marie-Anne [1 ]
Ernst, Thomas [1 ]
Jomaah, Jalal [2 ]
机构
[1] CEA, LETI, MINATEC, F-38054 Grenoble, France
[2] INPG, MINATEC, IMEP LAHC, F-38016 Grenoble, France
关键词
Device modeling; Gate-all-around MOSFET; Short-channel effects; Surface potential model; ALL-AROUND MOSFETS; SOI MOSFETS;
D O I
10.1016/j.sse.2010.11.008
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the first time, a continuous and explicit model valid in all operating regions, for undoped short-channel cylindrical gate-all-around (GAA) MOSFETs, is presented in this study. From a two-dimensional analysis, the threshold voltage roll-off, the drain-induced barrier lowering (DIBL) and the subthreshold swing are explicitly modeled. Short-channel effects are then implemented into a continuous drain-current model based on an effective surface potential approach using the gradual channel approximation. Improving the model behavior in the saturation operating region by accounting the channel pinch-off displacement, channel length modulation is studied and implemented as well. Analytical results are compared to TCAD-Atlas numerical simulations and validate the short-channel model in all operating modes making it suitable for circuit design simulations. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:40 / 46
页数:7
相关论文
共 28 条
[1]   Two-dimensional analytical threshold voltage roll-off and subthreshold swing models for undoped cylindrical gate all around MOSFET [J].
Abd-Elhamid, Hamdy ;
Iniguez, Benjamin ;
Jimenez, David ;
Roig, Jaume ;
Pallares, Josep ;
Marsal, Lluis F. .
SOLID-STATE ELECTRONICS, 2006, 50 (05) :805-812
[2]   Scaling theory for cylindrical, fully-depleted, surrounding-gate MOSFET's [J].
Auth, CP ;
Plummer, JD .
IEEE ELECTRON DEVICE LETTERS, 1997, 18 (02) :74-76
[3]  
BADELHAMID H, 2007, IEEE T ELECTRON DEV, V54, P572
[4]   New current-defined threshold voltage model from 2D potential distribution calculations in MOSFETs [J].
Biesemans, S ;
Kubicek, S ;
DeMeyer, K .
SOLID-STATE ELECTRONICS, 1996, 39 (01) :43-48
[5]   SHORT CHANNEL EFFECTS IN MOS-TRANSISTORS [J].
BJORKQVIST, K ;
ARNBORG, T .
PHYSICA SCRIPTA, 1981, 24 (02) :418-421
[6]   Precise Modeling Framework for Short-Channel Double-Gate and Gate-All-Around MOSFETs [J].
Borli, Hakon ;
Kolberg, Sigbjorn ;
Fjeldly, Tor A. ;
Iniguez, Benjamin .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2008, 55 (10) :2678-2686
[7]   A new compact subthreshold behavior model for dual-material surrounding gate (DMSG) MOSFETs [J].
Chiang, T. K. .
SOLID-STATE ELECTRONICS, 2009, 53 (05) :490-496
[8]   Multiple-gate SOI MOSFETs [J].
Colinge, JP .
SOLID-STATE ELECTRONICS, 2004, 48 (06) :897-905
[9]  
COUSIN B, 2009, IEEE VLSI TSA P
[10]  
COUSIN B, 2010, EUROSOI P