Multi-Channel SPAD Chip for Silicon Photonics With Multi-Photon CoIncidence Detection

We present the design and characterization of a microelectronic chip consisting of 32 independent single-photon counting and multi-photon time-coincidence channels, based on Single Photon Avalanche Diodes (SPADs). The chip aims at easing the assembly together with Silicon Photonics substrates and chips, for a broad spectrum of quantum applications. The chip provides not only 32 independent pulse outputs for multi-channel single-photon counting, but it features other two operation modalities. For single-photon applications, the chip provides the single-hit digital address of the channel detecting the photon among the 32 ones. For multi-photon applications, the chip provides an event-driven pulse every time more than n photons (n selectable between 2 and 4) concurrently trigger different channels. Each detection channel consists of 4 independent SPADs with different diameter (5 mu m, 10 mu m, 20 mu m, and 50 mu m), to easily match the waveguides and collection efficiency.