Quasi-field Method for Calculation of Surface Acoustic Wave Device's Characteristics

被引:0
作者
Yankin, Sergey S. [1 ]
Suchkov, Sergey G. [1 ]
Nikolaevtsev, Victor A. [1 ]
Suchkov, Dmitry S. [1 ]
Pavlova, Anastasia Yu. [2 ]
Talbi, Abdelkrim [2 ]
Nikitov, Sergey A. [1 ,3 ]
机构
[1] Saratov NG Chernyshevskii State Univ, St Astrakhanskaya 83, Saratov 410012, Russia
[2] EC Lille, Inst Elect Microelect & Nanotechnol, F-59652 Villeneuve Dascq, France
[3] Russian Acad Sci, Kotelnikov Inst Radio Engn & Elect, Moscow 125009, Russia
来源
Proceedings of the 2015 ICU International Congress on Ultrasonics | 2015年 / 70卷
关键词
surface acoustic wave; modeling; quiasi-field method; equivalent circuit; electron beam lithography;
D O I
10.1016/j.phpro.2015.08.182
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new modification of the quasi-field method for calculation of surface acoustic wave's devices was supposed, excluding the need for any phenomenological parameters. The results of comparison between the calculated and experimental data for the delay line on a lithium niobate crystal with nickel electrodes were demonstrated and a good agreement in amplitude-frequency characteristics and the time responses was shown. (C) 2015 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
引用
收藏
页码:884 / 887
页数:4
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