Optical calibration for nanocalorimeter measurements

被引:25
作者
Swaminathan, P. [1 ,2 ]
Burke, B. G. [2 ]
Holness, A. E. [2 ]
Wilthan, B. [3 ]
Hanssen, L. [3 ]
Weihs, T. P. [1 ]
LaVan, D. A. [2 ]
机构
[1] Johns Hopkins Univ, Dept Mat Sci & Engn, Baltimore, MD 21218 USA
[2] Natl Inst Stand & Technol, Div Ceram, Mat Measurement Lab, Gaithersburg, MD 20899 USA
[3] Natl Inst Stand & Technol, Opt Technol Div, Phys Measurement Lab, Gaithersburg, MD 20899 USA
基金
美国国家科学基金会;
关键词
Nanocalorimetry; Nanocalorimeter; Platinum emissivity; Thin film; Melting point; Calibration; FILM; EMISSIVITY;
D O I
10.1016/j.tca.2011.03.006
中图分类号
O414.1 [热力学];
学科分类号
摘要
We describe a method for calibration of nanocalorimeters from 573 K to 873 K, using resistive heating and optical pyrometry for temperature measurement. A platinum strip suspended on a silicon nitride membrane serves as both heater and temperature sensor. The calibration described here, relating resistance to temperature, enables subsequent temperature measurement. Measurements of the emissivity of as-deposited and annealed platinum thin films were also performed as a function of wavelength and temperature; these measurements are needed to correct the temperature recorded using the pyrometer. The calibration was validated by measurement of the melting point of a pure aluminum film: the melting point established with a Gaussian fit to the dT/dt data agreed within 0.1%(0.7 K) at 933.5 K. The melting point established from the minimum in the dT/dt plot agreed within 0.6% (5.5 K) at 933.5K. Finite element modeling was used to characterize the temperature distribution. Published by Elsevier B.V.
引用
收藏
页码:60 / 65
页数:6
相关论文
共 19 条
[1]   Fabrication, characterization and modeling of single-crystal thin film calorimeter sensors [J].
Anahory, Y. ;
Guihard, M. ;
Smeets, D. ;
Karmouch, R. ;
Schiettekatte, F. ;
Vasseur, P. ;
Desjardins, P. ;
Hu, Liang ;
Allen, L. H. ;
Leon-Gutierrez, E. ;
Rodriguez-Viejo, J. .
THERMOCHIMICA ACTA, 2010, 510 (1-2) :126-136
[2]   Temperature-resolved infrared spectral emissivity of SiC and Pt-10Rh for temperatures up to 900°C [J].
Cagran, Claus P. ;
Hanssen, Leonard M. ;
Noorma, Mart ;
Gura, Alex V. ;
Mekhontsev, Sergey N. .
INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2007, 28 (02) :581-597
[3]   Temperature dependence of the emissivity of platinum in the IR [J].
Deemyad, Shanti ;
Silvera, Isaac F. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (08)
[4]  
*DIN IEC, 1986, 751 DIN IEC
[5]   Ultrasensitive, fast, thin-film differential scanning calorimeter [J].
Efremov, MY ;
Olson, EA ;
Zhang, M ;
Schiettekatte, F ;
Zhang, ZS ;
Allen, LH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (01) :179-191
[6]   Measurement of heat capacity and enthalpy of formation of nickel silicide using nanocalorimetry [J].
Kummamuru, Ravi K. ;
De La Rama, Lito ;
Hu, Liang ;
Vaudin, Mark D. ;
Efremov, Mikhail Y. ;
Green, Martin L. ;
LaVan, David A. ;
Allen, Leslie H. .
APPLIED PHYSICS LETTERS, 2009, 95 (18)
[7]   A close proximity self-aligned shadow mask for sputter deposition onto a membrane or cavity [J].
Kummamuru, Ravi K. ;
Hu, Liang ;
Cook, Lawrence ;
Efremov, Mikhail Y. ;
Olson, Eric A. ;
Allen, Leslie H. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (09)
[8]   Melting point depression of Al clusters generated during the early stages of film growth: Nanocalorimetry measurements [J].
Lai, SL ;
Carlsson, JRA ;
Allen, LH .
APPLIED PHYSICS LETTERS, 1998, 72 (09) :1098-1100
[9]   Size-dependent melting properties of small tin particles: Nanocalorimetric measurements [J].
Lai, SL ;
Guo, JY ;
Petrova, V ;
Ramanath, G ;
Allen, LH .
PHYSICAL REVIEW LETTERS, 1996, 77 (01) :99-102
[10]   Heat transfer in symmetric U-shaped microreactors for thin film calorimetry [J].
Lopeandia, A. F. ;
Rodriguez-Viejo, J. ;
Chacon, M. ;
Clavaguera-Mora, M. T. ;
Munoz, F. J. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (05) :965-971