Fabrication Error Analysis and Compensation for Guided-Mode Resonance Biosensor

被引：1

作者：

Jia, Kehui ^{[1
]}

Ma, Junshan ^{[1
]}

机构：

[1] Univ Shanghai Sci & Technol, Coll Opt & Elect, Shanghai Key Lab Contemporary Opt Syst, Shanghai 200093, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2012年 / 24卷 / 04期

关键词：

Biosensor; guided-mode resonance; OBLIQUE-INCIDENCE; GRATING FILTER;

D O I：

10.1109/LPT.2011.2177520

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Effects of the fabrication errors on typical doublelayer guided-mode resonance filters were analyzed. The simulated results indicate that the grating period error mostly influences on the peak wavelength of biosensor. The grating period error was eliminated by adjusting the groove depth in the process of fabrication. A compensation example was given to illustrate the effectiveness of the compensations. The result shows that the peak wavelength has no deviation and the full-width at half-maximum changes slightly.

引用

页码：291 / 293

页数：3

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