Performance Enhancement of Interdigital Electrode-Piezoelectric Quartz Crystal (IDE-PQC) Salt Concentration Sensor by Increasing the Electrode Area of Piezoelectric Quartz Crystal (PQC)
被引:9
作者:
Zhang, Hui
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机构:
Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
Chengdu Univ Informat Technol, Engn Res Ctr Elect Microsyst, Chengdu 610225, Sichuan, Peoples R ChinaChengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
Zhang, Hui
[1
,3
]
Yao, Yao
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h-index: 0
机构:
Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
Univ Elect Sci & Technol China, Sch Automat Engn, Chengdu 610054, Peoples R China
Chengdu Univ Informat Technol, Engn Res Ctr Elect Microsyst, Chengdu 610225, Sichuan, Peoples R ChinaChengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
Yao, Yao
[1
,2
,3
]
Shi, Yue
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h-index: 0
机构:
Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
Chengdu Univ Informat Technol, Engn Res Ctr Elect Microsyst, Chengdu 610225, Sichuan, Peoples R ChinaChengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
Shi, Yue
[1
,3
]
机构:
[1] Chengdu Univ Informat Technol, Coll Commun Engn, Chengdu 610225, Sichuan, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Automat Engn, Chengdu 610054, Peoples R China
[3] Chengdu Univ Informat Technol, Engn Res Ctr Elect Microsyst, Chengdu 610225, Sichuan, Peoples R China
salt solution concentration sensor;
IDE-PQC;
sensitivity enhancement;
frequency stability;
MICROBALANCE;
SENSITIVITY;
BEHAVIOR;
D O I:
10.3390/s18103224
中图分类号:
O65 [分析化学];
学科分类号:
070302 ;
081704 ;
摘要:
In this paper, a new approach to enhance the performance of the interdigital electrode-piezoelectric quartz crystal (IDE-PQC) salt solution concentration sensor by modifying the electrode area of PQC was proposed. Equivalent circuit analysis showed that the static capacitor (C-0) which is related to the electrode area of PQC directly affected the response sensitivity of the IDE-PQC sensor. Further, the sensing responses of IDE-PQC sensors to various concentrations of salt solution were measured. Three kinds of salt solution, including NaCl, KCl, and Na2SO4, were adpoted to evaluate the sensing performances of the IDE-PQC sensors. The experimental results also indicated that increasing the electrode area of PQC can enhance the sensitivity response of the IDE-PQC sensors to the change of salt solution concentration. For example, the detection sensitivity of the IDE-PQC sensor with an electrode diameter of 5 mm was about three times larger than that of the sensor with an electrode diameter of 3 mm. Meanwhile, we found that the frequency stability of the IDE-PQC sensor was also improved by increasing the electrode area of PQC. In addition, the influence of the electrode area of PQC on the repeatability and the transient response of IDE-PQC salt solution concentration sensor were also studied. This work demonstrates simple and cost-effective method to achieve the performance enhancement of IDE-PQC salt solution concentration sensor by modifying the electrode area of PQC.
机构:Penn State Univ, Dept Elect Engn, Mat Res Lab 204, University Pk, PA 16802 USA
Cai, QY
Grimes, CA
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机构:
Penn State Univ, Dept Elect Engn, Mat Res Lab 204, University Pk, PA 16802 USAPenn State Univ, Dept Elect Engn, Mat Res Lab 204, University Pk, PA 16802 USA
机构:
Virginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Georgi Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee Blvd, Sofia 1784, BulgariaVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Esmeryan, Karekin D.
Castano, Carlos E.
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机构:
Virginia Commonwealth Univ, Dept Chem & Life Sci Engn, Nanomat Core Characterizat Facil, Med Coll Virginia Campus, Richmond, VA 23284 USAVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Castano, Carlos E.
Abolghasemibizaki, Mehran
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Virginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USAVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Abolghasemibizaki, Mehran
Mohammadi, Reza
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h-index: 0
机构:
Virginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USAVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
机构:Penn State Univ, Dept Elect Engn, Mat Res Lab 204, University Pk, PA 16802 USA
Cai, QY
Grimes, CA
论文数: 0引用数: 0
h-index: 0
机构:
Penn State Univ, Dept Elect Engn, Mat Res Lab 204, University Pk, PA 16802 USAPenn State Univ, Dept Elect Engn, Mat Res Lab 204, University Pk, PA 16802 USA
机构:
Virginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Georgi Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee Blvd, Sofia 1784, BulgariaVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Esmeryan, Karekin D.
Castano, Carlos E.
论文数: 0引用数: 0
h-index: 0
机构:
Virginia Commonwealth Univ, Dept Chem & Life Sci Engn, Nanomat Core Characterizat Facil, Med Coll Virginia Campus, Richmond, VA 23284 USAVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Castano, Carlos E.
Abolghasemibizaki, Mehran
论文数: 0引用数: 0
h-index: 0
机构:
Virginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USAVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA
Abolghasemibizaki, Mehran
Mohammadi, Reza
论文数: 0引用数: 0
h-index: 0
机构:
Virginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USAVirginia Commonwealth Univ, Dept Mech & Nucl Engn, Med Coll Virginia Campus, Richmond, VA 23284 USA